Proud of Silke Peeters for the first paper in our project @TUeindhoven. Plasma #ALDep of high-quality TaCxNx-1 using substrate bias, these ultrathin superconducting films are promising for a range of #quantum devices.@OxInst@QuantumSensors@ErwinKessels https://t.co/olKchYa9bt
@ErwinKessels@jv3sund Maybe I can convince Oxford Instruments to add a few colors to their new building. The blue square is already there :) https://t.co/sNg9do1NMi
Cool presentation yesterday at #AVS68 by Haozhe Wang from the Minnich group @CalTech on isotropic #ALEtch of AlN done on an @OxInst FlexAL. Great to see that the SF6/TMA process pioneered by Nick Chittock @TUeindhoven has many applications.
@ErwinKessels @TUeindhoven Excited about this upcoming project and working with all the partners @TUeindhoven, @OxInst, @UofGEngineering, @quant_ware, @orangeqs and Kavli Delft. Silke hit the ground running with her first conference presentation on plasma #ALDep of superconducting TaCxNy at #ALDALE2022.