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3 days ago

Metrology with twisted light. Ptychography reconstructs amplitude x phase from overlapping diffraction - no lens. Quantized angular momentum adds phase diversity for large-NA imaging. Path to EUV - X-ray chip and mask inspection. #Metrology #Chips #Masks #Semiconductors #LargeNA

$ProfPopmintchev's tweet photo. Metrology with twisted light. Ptychography reconstructs amplitude x phase from overlapping diffraction - no lens. Quantized angular momentum adds phase diversity for large-NA imaging. Path to EUV - X-ray chip and mask inspection. #Metrology #Chips #Masks #Semiconductors #LargeNA https://t.co/erY3qKQO2o$

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